Method of forming asymmetric spacers and methods of fabricating semiconductor device using asymmetric spacers

ABSTRACT

A method of fabricating asymmetrical spacers, structures fabricated using asymmetrical spacers and an apparatus for fabricating asymmetrical spacers. The method includes: forming on a substrate, a structure having a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to the sidewalls; forming a conformal layer on the top surface of the substrate, the top surface of the structure and the sidewalls of the structure; tilting the substrate about a longitudinal axis relative to a flux of reactive ions, the flux of reactive ions striking the conformal layer at acute angle; and exposing the conformal layer to the flux of reactive ions until the conformal layer is removed from the top surface of the structure and the top surface of the substrate leaving a first spacer on the first sidewall and a second spacer on the second sidewall, the first spacer thinner than the second spacer.

FIELD OF THE INVENTION

The present invention relates to the field of method of forming asymmetric spacers; more specifically, it relates to forming spacers of different widths on opposite sides of a raised line, methods of fabricating semiconductor devices using asymmetric spacers and semiconductor having asymmetrical source/drain structures.

BACKGROUND OF THE INVENTION

Asymmetric devices have drawn increasing attention as a method to suppress short channel effects in metal-oxide-silicon field effect transistors (MOSFETS). However, current technology forms asymmetrical devices by adding additional photolithographic process steps to existing methods. Additional photolithographic processes require additional photomasks and exposure tools and add additional time to the fabrication process, making such processes more costly and adversely effecting yield. Therefore, there is a need for a method of fabricating asymmetrical structures, including MOSFETs that do not require photolithographic steps to generate asymmetrical spacers.

SUMMARY OF THE INVENTION

A first aspect of the present invention is a method, comprising: (a) forming on a top surface of a substrate, a structure comprising a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to the sidewalls and to the top surface of the substrate; after (a), (b) forming a conformal layer on the top surface of the substrate, the top surface of the structure and the sidewalls of the structure; after (b), (c) tilting the substrate about an axis parallel to the longitudinal axis relative to a flux of reactive ions directed toward the top surface of the substrate, the flux of reactive ions striking the conformal layer at an angle less than 90° and greater than zero degrees relative to the top surface of the substrate; and after (c), (d) exposing the conformal layer to the flux of reactive ions until the conformal layer is removed from the top surface of the structure and the top surface of the substrate by the flux of reactive ions except in regions of the top surface of the substrate immediately adjacent to the sidewalls of the structure, the exposing leaving a first spacer on the first sidewall and a second spacer on the second sidewall.

A second aspect of the present invention is a structure, comprising: a silicon layer having a top surface; a gate stack comprising a gate dielectric layer on the top surface of the silicon layer and an electrically conductive gate electrode on a top surface of the gate electrode or comprises the gate electrode on the gate dielectric layer, the gate dielectric layer extending along the top surface of the silicon layer on either side of the gate stack; a first spacer on a first sidewall of the gate stack and a second spacer on a second and opposite sidewall of the gate stack, a first width of the first spacer measured from the first sidewall in a first direction perpendicular to the first sidewall is less than a second width of the second spacer measured from the second sidewall in a second direction perpendicular to the second sidewall, the first and second spacers decreasing in width from a bottom surface of the gate stack to a top surface of the gate stack; a first source/drain extension in the silicon layer under the first spacer and a second source/drain extension in the silicon layer under the second spacer, the first and second source/drain extensions separated by a channel region in the layer under the gate stack; a first source/drain in the silicon layer abutting the first source/drain extension and extending away from the channel region and a second source/drain in the silicon layer abutting the second source/drain extension and extending away from the channel region, the first source/drain and the second source/drain both comprising silicon germanium or both comprising carbon-doped silicon.

A third aspect of the present invention is a structure, comprising: a silicon layer having a top surface; a gate stack comprising a gate dielectric layer on the top surface of the silicon layer and an electrically conductive gate electrode on a top surface of the gate electrode or comprises the gate electrode on the gate dielectric layer, the gate dielectric layer extending along the top surface of the silicon layer on either side of the gate stack; a first spacer on a first sidewall of the gate stack and a second spacer on a second and opposite sidewall of the gate stack, a first width of the first spacer measured from the first sidewall in a first direction perpendicular to the first sidewall equal to a second width of the second spacer measured from the second sidewall in a second direction perpendicular to the second sidewall, the first and second spacers decreasing in width from a bottom surface of the gate stack to a top surface of the gate stack; a first source/drain extension in the silicon layer under the first spacer and a second source/drain extension in the silicon layer under the second spacer, the first and second source/drain extensions separated by a channel region in the layer under the gate stack; a first diffused-source/drain in the silicon layer abutting the first source/drain extension and extending away from the channel region and a second diffused-source/drain in the silicon layer abutting the second source/drain extension and extending away from the channel region; and a first hetero-source/drain in the silicon layer, abutting the first source/drain extension and extending away from the channel region and a second hetero-source/drain in the silicon layer separated from the second source/drain extension by the second diffused-source/drain and extending away from the channel region, the first hetero-source/drain and the second hetero-source/drain both comprising silicon germanium or both comprising carbon-doped silicon.

A fourth aspect of the present invention is a structure, comprising: a silicon layer having a top surface; a gate stack comprising a gate dielectric layer on the top surface of the silicon layer and an electrically conductive gate electrode on a top surface of the gate electrode or comprises the gate electrode on the gate dielectric layer, the gate dielectric layer extending along the top surface of the silicon layer on either side of the gate stack; a first spacer on a first sidewall of the gate stack, a second spacer on a second and opposite sidewall of the gate stack and a third spacer on the second spacer, a first width of the first spacer measured from the first sidewall in a first direction perpendicular to the first sidewall equal to a second width of the second spacer measured from the second sidewall in a second direction perpendicular to the second sidewall, the first, second and third spacers decreasing in width from a bottom surface of the gate stack to a top surface of the gate stack; a first source/drain extension in the silicon layer under the first spacer and a second source/drain extension in the silicon layer under the second and third spacers, the first and second source/drain extensions separated by a channel region in the layer under the gate stack; a first source/drain in the silicon layer abutting the first source/drain extension and extending away from the channel region and a second source/drain in the silicon layer abutting the second source/drain extension and extending away from the channel region, a first distance between the first source/drain and the channel region measured through the first source/drain extension region less than a second distance between the second source/drain and the channel region measured through the second source/drain extension region.

A fifth aspect of the present invention is an apparatus, comprising: a chamber having a gas inlet and an exhaust port connected to a vacuum pump; a magnetic filter positioned between means for generating an electron/reactive gas ion plasma from a gas supplied through the gas inlet and means for holding a substrate at a pre-selected angle between 0° and 90° relative to a plane defined by the magnetic filter; and means for applying a bias voltage to the means for holding the substrate.

BRIEF DESCRIPTION OF THE DRAWINGS

The features of the invention are set forth in the appended claims. The invention itself, however, will be best understood by reference to the following detailed description of an illustrative embodiment when read in conjunction with the accompanying drawings, wherein:

FIGS. 1A and 1B illustrate fabrication of asymmetrical spacers according to embodiments of the present invention;

FIG. 2A is a schematic representation of an exemplary apparatus for fabricating asymmetrical spacers according to embodiments of the present invention;

FIG. 2B is a diagram illustrating the method of keeping incident species normal to a wafer being etched in the exemplary apparatus of FIG. 2B;

FIGS. 3A through 3E are cross-sectional drawings illustrating fabrication of a first MOSFET device according to embodiments of the present invention;

FIGS. 3F through 3H are cross-sectional drawings illustrating additional steps for fabricating a second MOSFET according to embodiments of the present invention;

FIGS. 4A through 4C are cross-sectional drawings illustrating fabrication of a third MOSFET device according to embodiments of the present invention;

FIG. 5 is a cross-sectional drawing of the first MOSFET device fabricated on a silicon-on-insulator (SOI) substrate;

FIG. 6 is a cross-sectional drawing of the second MOSFET device fabricated on an SOI substrate; and

FIG. 7 is a cross-sectional drawing of the third MOSFET device fabricated on a SOI substrate.

DETAILED DESCRIPTION OF THE INVENTION

FIGS. 1A and 1B illustrate fabrication of asymmetrical spacers according to embodiments of the present invention. In FIG. 1, formed on a substrate 100 is a gate stack 110 comprising a dielectric layer 115 on a top surface 105 of the substrate, an electrically conductive gate electrode 120 on top of the dielectric layer and an optional dielectric capping layer 125 on top of the gate electrode. Formed on top surface 105 and sidewalls and a top surface of gate stack 110 is a conformal dielectric layer 130. A conformal layer is usually formed by a blanket deposition of a material to form a coating that follows the contours of the surface(s) being coated as opposed to a non-conformal layer where low spots in the surface being coated are filled in to give a flat or quasi-flat surface to the deposited layer. In one example, a conformal layer covers horizontal (e.g. top surface 105 defining the horizontal plane) and vertical surfaces (e.g. sidewalls of gate stack 110) to about the same thickness. The thickness of the layer may be less or greater on vertical surfaces than on horizontal surfaces. Substrate 100 is positioned in a flux of reactive ions 138 (i.e. reactive with conformal layer 130) with top surface 105 of substrate 100 forming an acute (less than 90°) angle θ to the direction of the reactive ion flux, which etches conformal layer 130.

In FIG. 1B, after reactive ion etch (RIE) of conformal layer 130 (see FIG. 1A), asymmetrical sidewall spacers 135A and 135B have been formed on opposite sidewalls of gate stack 110. Spacer 135A has been formed on the gate stack 110 sidewall that was closest to the reactive ion flux and spacer 135B has been formed on the gate stack 110 sidewall that was furthest from the reactive ion flux. Spacer 135A extends along top surface 105 of substrate 100 a distance D1 from gate stack 110 and spacer 135B extends along top surface 105 of substrate 100 a distance D2 from gate stack 110. D2 is greater than D1.

In one example, substrate 100 is a single-crystal bulk silicon wafer or an SOI wafer (wafers are generally flat circular disks.) In one example, gate dielectric layer 115 comprises silicon dioxide (SiO₂), silicon nitride (Si₃N₄), silicon carbide (Si:C), silicon oxy nitride (SiON), silicon oxy carbide (SiOC), organosilicate glass (Si:COH), plasma-enhanced silicon nitride (PSiN_(x)) or NBLok (Si:C(N,H)). In one example gate dielectric layer 115 is a high K (dielectric constant) material, examples of which include but are not limited to metal oxides such as Ta₂O₅, BaTiO₃, HfO₂, ZrO₂, Al₂O₃, or metal silicates such as HfSi_(x)O_(y) or HfSi_(x)O_(y)N_(z) or combinations of layers thereof. A high K dielectric material has a relative permittivity above about 10. In one example, gate dielectric layer 115 is about 0.5 nm to about 20 nm thick. In one example, gate electrode 120 comprises polysilicon, doped polysilicon, metal, metal silicide or combinations thereof. In one example, capping layer 125 comprises SiO₂, Si₃N₄, Si:C, SiON, SiOC, Si:COH, PSiN_(x) or Si:C(N,H). In one example, capping layer 125 is about 5 nm to about 200 nm thick. In one example, spacers 135A and 135B comprise SiO₂ or Si₃N₄.

While gate dielectric layer 115 is illustrated in FIGS. 1A and 1B as extending only under gate electrode 120, alternatively, gate dielectric layer 115 may extend over the entire top surface 105 and particularly under spacers 135A and 135B. With gate dielectric layer 115 covering top surface 105, substrate 100 is protected from attack by the reactive ion flux during the RIE and exposed gate dielectric layer may be removed at any appropriate step after formation of spacers 135A and 135B.

It should be understood that the present invention is not limited to forming asymmetrical spacers on a gate stack, but can be applied to forming asymmetrical spacers on any mesa-like structure having a top surface and two opposing sidewalls.

FIG. 2A is a schematic representation of an exemplary apparatus for fabricating asymmetrical spacers according to embodiments of the present invention. In FIG. 2A, an RIE tool 140 includes a process chamber 145, a gas inlet 150 (or inlets) and exhaust port 155, inductive coils 160 (coupled to a plasma power supply, not shown), a tiltable stage 165 and an array of magnetic filter cores 170. In operation, substrate 100 is placed on stage 165 and the stage tilted at an angle of (90-θ)° (θ was defined supra) and a non-equilibrium high density plasma (e.g. about 10¹² to about 10¹³ ions/cm³) is struck. Reactive ions formed in the plasma are drawn toward stage 165, passing between magnetic filter cores 170, by a biasing voltage applied to stage 165. A fixed stage (i.e. θ is fixed) may be substituted for tiltable stage 165. A flux of reactive ions then passes through magnetic filter cores 170 and strike wafer 100 at an angle θ relative to the top surface of the substrate. Magnetic filter cores 170 are spaced apart a distance S1, which is less than half the gyroradius of an electron at the magnetic field strength generated by the magnetic filter cores. In one example, a magnetic field of about 5 G to about 500 G is generated by magnetic filter cores 170. A typical etchant gas for SiO₂ or Si₃N₄ is CH_(x)F_(4-x). Alternatively, the plasma may be capacitively coupled to the plasmas generating power supply instead of being inductively coupled to the power supply.

FIG. 2B is a diagram illustrating the method of keeping incident species normal to a wafer being etched in the exemplary apparatus of FIG. 2B. Lines 175 represent the magnetic field B. The path of electrons (e−), positive ions (n+), and negative ions (n−) are illustrated. Electrons do not pass through the magnetic field while ions pass through perpendicular to the field. The gyroradius r_(g) defines the radius of circular motion of a charged particle in the presence of a uniform magnetic field and is given by equation (1):

$\begin{matrix} {r_{g} = \frac{{mv}\bot}{{q}B}} & (1) \end{matrix}$ where:

-   m is the mass of the charged particle, -   ν⊥ is the velocity component perpendicular to the direction of the     magnetic field, -   q is the charge on the particle, and -   B is the constant magnetic field.     For a typical electron at less than 20 eV, its gyroradius under a 50     G applied magnetic field is approximately 0.5 cm. By setting S1 to     less than 1 cm, all electrons with electron temperature less than 20     eV will be excluded from the region below magnetic filter cores 170     (see FIG. 2A), whereas less mobile ions (positive or negative) will     not. This results in a flux of charged ions only through the     magnetic filter region, and a consequent build-up of ion-ion plasma     between the magnetic filter and the substrate. Since the formation     of a sheath just above the surface of a substrate in a plasma     environment requires a differential mobility between charged species     in gaseous plasma (e.g. electrons and ions), there is no sheath     formed above substrate 100 in the inventive method because electrons     have been excluded from the region just above the substrate by     magnetic filter cores 170 and a self-bias is generated in the     direction normal to the wafer surface. Reactive neutral species are     still present above the wafer. With appropriate chemistry selection     etching will proceed preferentially on the spacer sidewall titled     toward the incident ion flux.

FIGS. 3A through 3E are cross-sectional drawings illustrating fabrication of a first MOSFET device according to embodiments of the present invention. In FIG. 3A, formed on substrate 100 is gate stack 110 comprising dielectric layer 115 on top surface 105 of the substrate, electrically conductive gate electrode 120 on top of the dielectric layer and optional dielectric capping layer 125 on top of the gate electrode. A source/drain extensions 180 have been formed on opposite sides of gate stack 110 by, for example, ion implantation of a dopant species such as arsenic, phosphorus or boron using the gate stack as an ion implantation mask. A trench isolation 185 is formed in substrate 100 abutting source/drain extensions 180.

In one example, trench isolation is formed prior to formation of gate stack 110. Trench isolation 185 extends from top surface 105 of substrate 100 into the substrate. Trench isolation 185 may be formed by etching a trench into substrate 100, depositing a dielectric layer over substrate 100 to completely fill the trenches and then performing a chemical-mechanical polish to coplanarize top surface 105 of substrate 100 and a top surface of trench isolation 185. In one example, trench isolation comprises high-density plasma (HDP) silicon oxide or chemical-vapor-deposition (CVD) tetraethoxysilane (TEOS) oxide. In one example, trench isolation 185 comprises a dielectric liner, such as SiO₂ and a polysilicon core.

In FIG. 3B, formed on top surface 105 and on sidewalls and the top surface of gate stack 110 is conformal dielectric layer 130.

In FIG. 3C, a tilted RIE process as illustrated in FIGS. 1A, 1B, 2A and 2B and described supra has been performed to form asymmetrical spacers 135A and 135B. Spacers 135A and 135B extend over source/drain extensions 180 toward trench isolation and do not completely cover the source/drain extensions.

In FIG. 3D, trenches 190 are etched through source/drain extensions 180 into substrate 100 to form a first source/drain extensions 180A under spacer 135A and a second source/drain extensions 180B under spacer 135B, where the source/drain extensions 180 (see FIG. 3C) was not protected by spacers 135A and 135B. Trenches 190 are bounded by trench isolation 185 on one side as shown and on opposite ends not shown, see discussion infra.

In FIG. 3E, a first hetero-source/drain 195A and a second hetero-source/drain 195B of an FET 205A are formed by epitaxially growing silicon germanium (SiGe) if FET 205A is a p-channel FET (PFET) or carbon-doped silicon (Si:C) if FET 205A is an n-channel FET (NFET), in trenches 190 (see FIG. 2D). If FET 205A is a PFET, first and second source/drain extensions 180A and 180B are doped P-type and substrate 100 is doped N-type) or the region of substrate 100 illustrated in FIG. 3E is doped N-type (i.e. is an N-well). If FET 205A is a NFET, first and second hetero-source/drains 195A and 195B, first and second source/drain extensions 180A and 181B are doped N-type and substrate 100 is doped P-type) or the region of substrate 100 illustrated in FIG. 3E is doped P-type (i.e. is a P-well). First source/drain extension 180A has length L1 and second source/drain extension 180B has a length L2, with L2 greater than L1. It should be understood, that the cross-sections of FIGS. 1A, 1B, 3A, 3B, 3C, 3D, 3E, 3F, 3G, 3H, 4A, 4B, 4C, 5, 6 and 7 are in a lengthwise direction, with a widthwise direction running into and out of the plane of the drawing, the lengthwise direction and widthwise direction being perpendicular and lying in a plane parallel to a plane defined by top surface 105 of substrate 100. Trench isolation 185 surrounds FET 205A along the entire perimeter of FET 205A. From an end view of FET 205A (also FET 205D of FIG. 5), trench isolation 185 would abut first and second hetero-source/drains 195A and 195B, first and second source/drain extensions 180A and 180B and channel region 200 laterally isolating the FET.

Because of the SiGe or Si:C source/drains, a channel region 200 between the first source/drain extensions 180A and the second source/drain extensions 180B under gate 120 is under compressive or tensile stress, so FET 205A is a strained FET. Further, because L1 is not equal to L2, FET is also an asymmetrical FET. First and second hetero-source/drains 195A and 195B may be doped in-situ during epitaxial growth (to form a self-aligned source/drains) or doped afterwards by ion implantation other suitable techniques such as plasma doping.

FIGS. 3F through 3H are cross-sectional drawings illustrating additional steps for fabricating a second MOSFET according to embodiments of the present invention. In FIG. 3F, first and second spacers 180A and 180B of FIG. 3E are removed by wet or dry etching.

In FIG. 3G, conventional symmetrical spacers 210A and 210B are formed on opposite sidewalls of gate stack 110. Conventional spacers are formed depositing a conformal layer followed by RIE etching the conformal layer with the substrate top surface perpendicular to the direction of the reactive ion flux (e.g. θ=90°). Both spacers 210A and 210B extend along top surface 105 of substrate 100 a distance D3 from gate stack 110 toward trench isolation 185. A portion 212 of second source/drain extensions 180B is not covered by spacer 210B, while all of spacer 180A is covered by spacer 210A.

In FIG. 3H, an FET 205B is completed by forming first and second diffused-source/drains 215A and 215B in substrate 100 by ion implantation or plasma doping (of a P-type dopant if FET 205B is a PFET and an N-type dopant if FET 205B is an NFET) where the substrate is not protected by gate stack 110, spacers 210A and 210B or trench isolation 185. From an end view of FET 205B (also FET 205E of FIG. 6), trench isolation 185 would abut first and second hetero-source/drains 195A and 195B, first and second diffused-source/drains 215A and 215B, first and second source/drain extensions 180A and 180B and channel region 200 laterally isolating the FET.

FIGS. 4A through 4C are cross-sectional drawings illustrating fabrication of a third MOSFET device according to embodiments of the present invention. In FIG. 4A, formed on substrate 100 is gate stack 110 comprising dielectric layer 115 on top surface 105 of the substrate, electrically conductive gate electrode 120 on top of the dielectric layer and optional dielectric capping layer 125 on top of the gate electrode. Source/drain extensions 180 have been formed on opposite sides of gate stack 110. Trench isolation 185 has been formed in substrate 100 abutting source/drain extensions 180. And conventional symmetrical spacers 220A and 220B have been formed on opposite sidewalls of gate stack 110. Both spacers 220A and 220B extend along top surface 105 of substrate 100 a distance D4 from gate stack 110 toward trench isolation 185.

In FIG. 4B, a spacer 225B is formed over spacer 220B. Spacers 220A and 220B are a different material than the material of spacer 220B. Spacer 225B is formed by performing a tilted RIE process as described supra, at a sufficient angle and length of time so as to remove any spacer that might be formed on spacer 220A. Alternatively, by adjustment of angle and time, a spacer 225A (dashed lines) will be formed simultaneously with spacer 225B. Spacer 225A will have a smaller width than that of spacer 225B (see for example, FIG. 1B).

In FIG. 4C, an FET 205C is completed by forming source/drains 215A and 215B in substrate 100 by ion implantation (of a P-type dopant if FET 205B is a PFET and an N-type dopant if FET 205B is an NFET) where the substrate is not protected by gate stack 110, spacers 210A, 210B and 220B and trench isolation 185. In FIG. 4C, a first source/drain extensions 180C has length L3 and second source/drain extensions 180D has a length L4, with L4 greater than L3. In one example, spacers 220A and 220B are SiO₂ and spacers 225B (and 225A, if present) are Si₃N₄. From an end view of FET 205C (also FET 205F of FIG. 7), trench isolation 185 would abut first and second diffused source/drains 215A and 215B, first and second source/drain extensions 180A and 180B and channel region 200 laterally isolating the FET.

In order fabricate a fourth MOSFET device according to the present invention, it is necessary to return to FIG. 4B. At this point in the process, trenches 190A may be formed in substrate 100 where the substrate is not protected by gate stack 110, spacers 220A, 220B and 225B (and 225A if present) and trench isolation 185 and then filled with either SiGe or Si:C as described supra, in which case source/drains 215A and 215B of FIG. 4C would both include SiGe or Si:C.

FIG. 5 is a cross-sectional drawing of the first MOSFET device fabricated on a SOI substrate. In FIG. 5, an FET 205D is similar to FET 205A of FIG. 3E except, trench isolation 185, hetero-source/drains 195A and 195B, source/drain extensions 180A and 180B and channel region 200 are formed in a single-crystal silicon layer 230 separated from substrate 100 by a buried insulating layer such as buried oxide layer (BOX) 235. Trench isolation abuts BOX 235. In one embodiment, hetero-source/drains 195A and 195B also abut BOX 235.

FIG. 6 is a cross-sectional drawing of the second MOSFET device fabricated on an SOI substrate. In FIG. 6, an FET 205E is similar to FET 205B of FIG. 3H except, trench isolation 185, hetero-source/drains 195A and 195B, diffused source/drains 205A, 205B source/drain extensions 180A and 180B and channel region 200 are formed in a single-crystal silicon layer 230 separated from substrate 100 by BOX 235. Trench isolation abuts BOX 235. In one embodiment, diffused source/drains 205A and 205B also abut BOX 235.

FIG. 7 is a cross-sectional drawing of the third MOSFET device fabricated on a SOI substrate. In FIG. 7, an FET 205F is similar to FET 205C of FIG. 4C except, trench isolation 185, diffused source/drains 215A and 215B, 205B source/drain extensions 180A and 180B and channel region 200 are formed in a single-crystal silicon layer 230 separated from substrate 100 by BOX 235. Trench isolation 185 abuts BOX 235. In one embodiment, diffused source/drains 215A and 215B also abut BOX 235.

Thus the present invention provides a method of fabricating asymmetrical spacers and asymmetrical MOSFETs without defining the asymmetrical elements with photolithographic steps.

The description of the embodiments of the present invention is given above for the understanding of the present invention. It will be understood that the invention is not limited to the particular embodiments described herein, but is capable of various modifications, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, it is intended that the following claims cover all such modifications and changes as fall within the true spirit and scope of the invention. 

1. A method, comprising: (a) forming a gate stack on a top surface of a silicon substrate, said gate stack comprising a gate dielectric layer on said substrate and an electrically conductive gate electrode on said gate dielectric layer, said gate stack having a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to said sidewalls and to said top surface of said substrate; after (a), (b) forming a conformal layer over said top surface of said substrate and on said top surface and said first and second sidewalls of said gate stack; after (b), (c) tilting said substrate about an axis parallel to said longitudinal axis relative to a flux of reactive ions directed toward said top surface of said substrate said flux of reactive ions striking said conformal layer at an angle less than 90° and greater than zero degrees relative to said top surface of said substrate; after (c), (d) exposing said conformal layer to said flux of reactive ions until said conformal layer is removed from said top surface of said structure and said top surface of said substrate by said flux of reactive ions except in regions of said top surface of said substrate immediately adjacent to said sidewalls of said gate stack, said exposing leaving a first spacer on said first sidewall and a second spacer on said second sidewall; after (d), (e) etching a first trench into said substrate adjacent to said first spacer and etching a second trench into said substrate adjacent to said second spacer where said substrate is not protected by said gate stack and said first and second spacers; after (e), (f) filling said first and second trenches with silicon germanium or filling said first and second trenches with carbon doped silicon, to form respective first and second hetero-source/drains; after (f), (g) removing said first and second spacers; after (g), (h) forming a third spacer on said second sidewall of said gate stack and forming a fourth spacer on said second sidewall of said gate stack, said third spacer covering all of said first source/drain extension between said gate stack and said first hetero-source/drain, said fourth spacer covering only a portion of said second source/drain extension immediately adjacent to said second sidewall of said gate stack, said third and fourth spacers formed by blanket deposit of an additional conformal layer and reactive ion etching said additional conformal layer; and after (h), (i) performing an ion implantation or plasma doping of dopant species to form a first-diffused source/drain in said substrate adjacent to said third spacer and to form a second-diffused source/drain in said substrate adjacent to said fourth spacer.
 2. The method of claim 1, further including: generating said flux of reactive ions in an inductively coupled plasma.
 3. The method of claim 1, further including: generating said flux of reactive ions in a capacitively coupled plasma.
 4. The method of claim 1, further including: generating said flux of reactive ions in a plasma having a plasma density of between about 10¹² and 10¹³ ions per cm³.
 5. The method of claim 1, wherein said flux of reactive ions is directed toward said top surface of said substrate through a magnetic filter.
 6. The method of claim 5, wherein said magnetic filter includes cores spaced apart less than a gyroradius of an electron.
 7. The method of claim 5, wherein said magnetic filter has a field strength between about 5 G and about 500 G.
 8. A method of comprising: (a) forming on a top surface of a substrate, a structure comprising a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to said sidewalls and to said top surface of said substrate; after (a), (b) forming a conformal layer on said top surface of said substrate, said top surface of said structure and said sidewalls of said structure; after (b), (c) tilting said substrate about an axis parallel to said longitudinal axis relative to a flux of reactive ions directed toward said top surface of said substrate through a magnetic filter, said flux of reactive ions striking said conformal layer at an angle less than 90° and greater than zero degrees relative to said top surface of said substrate; after (c), (d) exposing said conformal layer to said flux of reactive ions until said conformal layer is removed from said top surface of said structure and said top surface of said substrate by said flux of reactive ions except in regions of said top surface of said substrate immediately adjacent to said sidewalls of said structure, said exposing leaving a first spacer on said first sidewall and a second spacer on said second sidewall; after (d), (e) forming a gate stack on a top surface of a silicon substrate, said gate stack comprising a gate dielectric layer on said substrate and an electrically conductive gate electrode on said gate dielectric layer, said gate stack having a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to said sidewalls and to said top surface of said substrate; after (e), (f) forming a first source/drain extension in said substrate adjacent to said first sidewall of said gate stack and forming a second source/drain extension in said substrate adjacent to said second sidewall of said gate stack, said first and second source/drain extensions separated by a channel region in said substrate under said gate stack; after (f), (g) forming first and second spacers on respective first and second sidewalls of said gate stack, said first and second spacers formed by blanket deposit of a first conformal layer and reactive ion etching said first conformal layer; after (g), (h) forming a second conformal layer over said top surface of said substrate and on said first and second spacers; after (h), (i) tilting said substrate about an axis parallel to said longitudinal axis relative to a flux of reactive ions directed toward said top surface of said substrate said flux of reactive ions striking said conformal layer at an angle less than 90° and greater than zero degrees relative to said top surface of said substrate; after (i), (j) exposing said conformal layer to said flux of reactive ions until said conformal layer is removed from said top surface of said structure and said top surface of said substrate by said flux of reactive ions except in regions of said top surface of said substrate immediately adjacent to said sidewalls of said gate stack, said exposing leaving a third spacer on said first spacer and a fourth spacer on said second spacer; and after (j), (k) removing said third spacer and then performing an ion implantation or plasma doping of dopant species to form a first diffused source/drain in said substrate adjacent to said first spacer and to form a second diffused source/drain in said substrate adjacent to said fourth spacer.
 9. The method of claim 8, wherein a first width of said first spacer, measured from said first sidewall in a first direction perpendicular to said first sidewall is less than a second width of said second spacer, measured from said second sidewall in a second direction perpendicular to said second sidewall.
 10. The method of claim 8, wherein said first sidewall is tilted toward said flux of reactive ions and said second sidewall is tilted away from said flux of reactive ions.
 11. The method of claim 8, further including: said substrate is a silicon on insulator substrate.
 12. The method of claim 8, wherein: said first diffused-source/drain extends from said top surface through an entire bottom surface of said first hetero-source/drain into said substrate; said second diffused-source/drain extends from said top surface through an entire bottom surface of said second hetero-source/drain into said substrate; and said second diffused-source/drain extends from said top surface of said substrate between said second hetero-source/drain and said second source/drain extension into said substrate.
 13. The method of claim 8, further including: generating said flux of reactive ions in an inductively coupled plasma.
 14. The method of claim 8, further including: generating said flux of reactive ions in a capacitively coupled plasma.
 15. The method of claim 8, further including: generating said flux of reactive ions in a plasma having a plasma density of between about 10¹² and 10¹³ ions per cm³.
 16. The method of claim 8, wherein said flux of reactive ions is directed toward said top surface of said substrate through a magnetic filter.
 17. The method of claim 16, wherein said magnetic filter includes cores spaced apart less than a gyroradius of an electron.
 18. The method of claim 8, wherein said magnetic filter has a field strength between about 5 G and about 500 G.
 19. The method of claim 18, wherein said magnetic filter includes cores spaced apart less than a gyroradius of an electron at said field strength.
 20. A method, comprising: (a) forming a gate stack on a top surface of a silicon substrate, said gate stack comprising a gate dielectric layer on said substrate and an electrically conductive gate electrode on said gate dielectric layer, said gate stack having a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to said sidewalls and to said top surface of said substrate; after (a), (b) forming a first source/drain extension in said substrate adjacent to said first sidewall of said gate stack and forming a second source/drain extension in said substrate adjacent to said second sidewall of said gate stack, said first and second source/drain extensions separated by a channel region in said substrate under said gate stack; after (b), (c) forming first and second spacers on respective first and second sidewalls of said gate stack, said first and second spacers formed by blanket deposit of a first conformal layer and reactive ion etching said first conformal layer; after (c), (d) forming a second conformal layer over said top surface of said substrate and on said first and second spacers; after (d), (e) tilting said substrate about an axis parallel to said longitudinal axis relative to a flux of reactive ions directed toward said top surface of said substrate said flux of reactive ions striking said conformal layer at an angle less than 90° and greater than zero degrees relative to said top surface of said substrate; after (e), (f) exposing said conformal layer to said flux of reactive ions until said conformal layer is removed from said top surface of said structure and said top surface of said substrate by said flux of reactive ions except in regions of said top surface of said substrate immediately adjacent to said sidewalls of said gate stack, said exposing leaving a third spacer on said first spacer and a fourth spacer on said second sidewall; and after (f), (g) removing said third spacer and then etching a first trench into said substrate adjacent to said first spacer and etching a second trench into said substrate adjacent to said fourth spacer where said substrate is not protected by said gate stack, said first, second and fourth spacers; after (g), (h) filling said first and second trenches with silicon germanium or filling said first and second trenches with carbon doped silicon, to form respective first and second hetero-source/drains; after (h), (i) performing an ion implantation or plasma doping of dopant species to form a first diffused source/drain in said substrate adjacent to said first spacer and to form a second diffused source/drain in said substrate adjacent to said fourth spacer.
 21. The method of claim 20, wherein: said first diffused-source/drain extends from said top surface through an entire bottom surface of said first hetero-source/drain into said substrate; said second diffused-source/drain extends from said top surface through an entire bottom surface of said second hetero-source/drain into said substrate; and said second diffused-source/drain extends from said top surface of said substrate between said second hetero-source/drain and said second source/drain extension into said substrate.
 22. The method of claim 20, further including: generating said flux of reactive ions in an inductively coupled plasma.
 23. The method of claim 20, further including: generating said flux of reactive ions in a capacitively coupled plasma.
 24. The method of claim 20, further including: generating said flux of reactive ions in a plasma having a plasma density of between about 10¹² and 10¹³ ions per cm³.
 25. The method of claim 20, wherein said flux of reactive ions is directed toward said top surface of said substrate through a magnetic filter.
 26. The method of claim 25, wherein said magnetic filter includes cores spaced apart less than a gyroradius of an electron.
 27. The method of claim 25, wherein said magnetic filter has a field strength between about 5 G and about 500 G.
 28. The method of claim 20, wherein: said first source/drain extends from said top surface through an entire bottom surface of said first hetero-source/drain into said substrate; said second source/drain s extends from said top surface through an entire bottom surface of said second hetero-source/drain into said substrate; and said second source/drains extends from said top surface of said substrate between said second hetero-source/drain and said second source/drain extension into said substrate. 